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Lei Chen, Process Engineer

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Lei Chen is a Material Research Engineer in the CNST NanoFab Operations Group, where he is responsible for the process development in nanoimprint lithography, plasma etching, atomic layer deposition, and nanostructure characterization. Lei received his Ph.D. in Polymer Science and Engineering from Nanjing University in China, where he worked as an associate professor until 1999. He then joined the Nanostructure Laboratory at Princeton University as a research associate working on novel nanofabrication technology development. From 2001 to 2007, Lei worked at NanoOpto Corp. as a senior engineer on the process development for nano-optical devices. His professional experience includes the fabrication of nano-devices in semiconductor optoelectronic, chemical and biomedical systems, polymer self-assembled nanostructures, surface patterning and nanocomposites. He has over 50 scientific publications and 5 patents.



Selected Publications:

  • 58nm Half-Pitch Plastic Wire-Grid-Polarizer by Nano-Imprint Lithography, L. Chen, J. Wang, F. Waters, X. Deng, M. Buonanno, S.Tai, and X. Liu, Journal of Vacuum Science and Technology B 25(6), 2654 (2007).
  • Defect Control in NanoImprint Lithography, L.Chen, X.Deng, J.Wang, K.Takahashi, F.Liu, Journal of Vacuum Science and Technology B 23(5/6), 2933 (2005).
  • Resonant Grating Filters as Refractive Index Sensors for Chemical and Biological Detections, J.Wang, L.Chen, S.Kwan, F.Liu and X.Deng, Journal of Vacuum Science and Technology B 23,(5/6) 3006 (2005).
  • Novel Polymer Patterns Formed by Lithographically Induced Self-Assembly, L. Chen, L. Zhuang, P. Deshpande and S. Chou, Langmuir 3(21), 818 (2005).
  • Direct three-dimentional patterning using nanoimprint lithography, M. Li, L. Chen and S. Y.Chou, Applied Physics Letters 78(21), 3322 (2001).
  • Kinetics and Mechanism of the Rod-to-Vesicle Transition of Block Copolymer Aggregates in Dilute Solution, L. Chen, H. Shen and A. Eisenberg, Journal of Chemical Physics B 103, 9488-9497 (1999).

Expertise:

  • Nanofabrication process development
  • Nanoimprint lithography development
  • Self-assembled nanostructures


Online: May 2007
Last Updated: August 2008

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