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staff photo Rich Kasica

Richard Kasica, Process Engineer

Contact Information

Richard Kasica is a process engineer in the NanoFab Operations Group in CNST. Richard received his B.S. degree in engineering physics from the Ohio State University and an M.S. degree in applied physics from SUNY-Binghamton. Prior to joining NIST, he held positions at GE-CRD, Lucent Technologies, and Oak Ridge National Laboratory where he was principally involved in developing electron beam lithography based micro- and nano-fabrication processes. As a process engineer in CNST, he is responsible for the operation of the electron beam and l aser writing lithography tools and associated processes.



Expertise:

  • Electron-beam lithography process development
  • CVD and PVD process development



Online: March 2007
Last Updated: August 2008

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