Nanofab Forms, Manuals and CORAL Information

General Forms

To view some documents linked from this page you will need PDF Reader and Microsoft Word or equivalent word processor.

• Nanofab Project Application: (Note:These forms replace the Coral User Form and Nanofab Proposal Form)
  • Internal User Form
  • External User Form
• Interdivision Work Order (Please submit a maximum estimate for the field "Authorized Charges.")
• Nanofab Safety Certification Examination Answer Sheet PDF, DOC
  
  

General Manuals

• Nanofab Laboratory Manual
• NIST Nanofab Safety Manual
  
  

Nanofab Tool Manuals

• Lithography
  • Laurell Spin Coater Manual
  • Leica VB300 UHR E-Beam
  • JEOL 6400 E-Beam Lithography
  • Nanonex Nano-Imprint
  • Suss MA6 Contact Aligner
  • Suss MA8 Contact Aligner
  • Suss MA6/MA8 Start-up and Shut-down Procedure
    
    
• Oxidation/Diffusion/Anneal/Doping
  • Level 1 Manual for Tystar Oxidation Furnace
  • Rapid Thermal Processing-RTP
    
    
• Chemical Vapor Deposition
  • Level 1 Manual for Tystar LPCVD
  • Unaxis PECVD
    
    
• Dry Etch
  • PVA Tepla Microwave Asher
  • Standard Operating Procedure for XeF2 Etcher
  • Unaxis Deep Silicon Etcher
  • Unaxis Metal ICP-Chlorine
  • Unaxis Metal RIE-Fluorine
  • Unaxis RIE
    
    
• Metal PVD
  • Denton Sputter-Discovery 22
  • Denton Thermal Evaporator-Infinity 22
  • Denton Thermal + E-beam Evaporator-Infinity 22
    
    
• Chemistry
  • CMOS Wet Chemistry Bench
  • General Wet Chemistry Bench
    
    
• Inspection
  • 4-Point Probe Station
  • Dektak Profilometer
  • Nanospec
  • Woollam Ellipsometer
  • Zeiss Ultra 60 FE-SEM Procedure
    
    
• Post Process
  • Disco 341 Wafer Dicing Saw
  • Critical Point Dryer
  • K&S Wire Bonder
  • Focused Ion Beam System
    
    

CORAL and xReporter Manuals

• Coral Tutorial, printer-friendly downloadable PDF
• xReporter Tutorial

Free Viewer Downloads: Adobe Reader and Microsoft Word.

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Online: February 2006
Last Updated: July 2008

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