Optical MEMS and NEMS

Integrated optical micro electro mechanical systems (MEMS) with nanoscale elements (NEMS) are being developed to enable novel imaging, metrology, manipulation and assembly techniques at the nanoscale. Topics of interest include: mechanically agile scanning probes; high accuracy and sensitivity integrated optical sensing and actuation of MEMS; manipulation of MEMS and NEMS with holographic optical tweezers; high throughput nearfield optical imaging using nanofabricated optical reference structures.

Holographic Optical Tweezer (HOT) System
Analytical probe station with a laser cutter
White light optical profiler with dynamic characterization capability

Optically operated nanoscale mechanical tools
High throughput optical nearfield imaging
Agile versatile MEMS nanoprobes

Vladimir Aksyuk - Univerisity of Maryland
Houxun Miao - Univerisity of Maryland
Stephan Koev - Univerisity of Maryland

Daniel Lobez, Argonne National Labs

Online: May 2009
Last Updated: October 2009

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